Dektak XTL 探针式表面轮廓仪

产地：

美国

型号：

Dektak XTL

Dektak XTL Stylus Profiler System

Bruker  new Dektak XTL stylus profiler accommodates samples up to 350mm x 350mm, bringing legendary Dektak^@repeatability and reproducibility to large-format wafer and panel manufacturing. The Dektak XTL features a small footprint with pneumatic passive isolation and a fully enclosed workstation with a wide, easily accessible interlocking door, making it ideal for today’s demanding production floor environments. Its dual-camera architecture enables enhanced spatial awareness, and its high level of automation maximizes manufacturing throughput. Bruker’s exclusive Vision64^@ Production Interface with pattern recognition can be scaled to meet your needs and makes data collection an intuitive and repeatable process, minimizing operator-to-operator variability.

Dektak XTL Delivers

Bruker-Exclusive Dual Camera Control™

Navigate to points of interest faster by clicking in live video

Quickly orient sample to be measured by selecting twopoints in the live video (Make Horizontal)

Simplify measurement setup by point-and-click scan startand end positions in live video (Teach)

Robust Automation Setup and Operation

Accurately program fiducials and unlimited measurementsites via 300mm, automated encodedXY stage and

360-degree  θ

Minimize errors utilizing Vision64 Production Interface withpattern recognition

Program custom user prompts as well as other meta datainto your recipe and store to thedatabase

Easy Analysis and Data Collection

Easily automate analysis routines using Quick Analyzer,which supports most frequently usedanalyses

Focus your analysis to report only the features needed oncomplex samples using Step Detection

Simplify data analysis by giving each measurement siteunique name and automatically log to database

Critical Resultsfor Large-Format Applications

With its unique combination of superiorperformance and ease of use, the Dektak XTLis the new QA/QC and research standardfor industrial thin film deposition monitoringin touch-panel, solar, flatpanel display, andsemiconductor industries.

Wafer Applications:

Step height for deposited thin films(metals, organics)

Step height for resists (soft film materials)

Etching rate determinations

Chemical mechanical polishing(erosion, dishing, bow)

Large Substrate Applications:

Printed circuit boards (bumps, step heights)

Window coatings

Wafer masks

Wafer chuck coatings

Polishing pads

Glass Substrate and Display Applications:

AMOLEDs

Step height measurements for LCD R&D

Film thickness measurements for touchpanels

Thin film measurements for solar coatings

Flexible Electronic Films:

Organic photodetectors

Organic films printed on films and glass

Copper traces for touch screens

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