第1年
BS-80011BPG产生高密度内置型等离子
日本电子JED-2300/2300F 能谱仪 P
日本电子JSM-IT700HR触摸屏控制热场
日本电子JBX-6300FS 电子束光刻系统
日本电子JMS-T2000GC AccuTOF™ GC-
日本电子JIB-4700F聚焦离子束双束(F
日本电子JXA-iHP200F 场发射电子探
日本电子JSM-IT500 扫描电子显微镜
JMS-T2000GC AccuTOF™ GC-Alpha 高
- 产地：
- 日本
- 型号：
- RF-340 系列
RF-340 系列匹配网络自动整合装置
和产生等离子体的13.56MHz高频电源组合，与负载进行匹配的自动调整装置 (匹配箱 + 控制器) 。
Features特点
RF-340 series Matching Network
An automatic matching device to match the load to the 13.56 MHz RF power supply for plasma generation. Matching box + Controller
Functions功能
Preset (8 point)
Records the settings of each of the variable capacitors for the points that have been matched.
Auto-preset
Auto control driving the variable capacitors to the preset settings when output is zero, and then outputting the RF
Auto-delay
No immediate reaction to sudden changes in the load, such as arcing, with automatic operation after a specified period of time has elapsed.
Variable capacitor position display
Variable capacitor drive range setting
Control of the variable capacitor drive range setting during automatic operation
Vdc display
Vdc meter relay
Vdc stabilization control
Vpp display
Vpp meter relay
Load impedance display
When matching is obtained, the plasma impedance is calculated and displayed
CE compliant （excluding some devices）
技术规格：
| Matching box匹配箱 | ||||
| RF-34021 | RF-34031 | RF-34041 | ||
| Permitted transmitted power | 1.5kW | 3kW | 6kW | |
| Input connector | N type | LS2 type | ||
| Frequency | 13.56MHz | |||
| Input impedance | 50 Ω | |||
| Fan power supply | DC 24V (supplied from the controller) | |||
| Matching control | Vacuum variable capacitor | |||
| Tuning control | Vacuum variable capacitor | |||
| Residual reflected power | Within 10% of the input power | |||
| Cooling method | Water (2～3L/min) | Water (2.5～3L/min) | ||
| Dimensions (mm) | Width | 370 | 470 | |
| Depth | 300 | 370 | ||
| Height | 205 | 246 | ||
| Mass (kg) | 15 | 19 | ||
| Controller | ||||
| Input power | DC 24V, 4A ( to be provided separately ) | |||
| Dimensions (mm) | 140 (W) × 305 (D) × 145 (H) | |||
| Control method | Digital control | |||
| Mass | 1.5kg | |||
RF-340 系列匹配网络自动整合装置由日本电子株式会社(JEOL) 为您提供，如您想了解更多关于RF-340 系列匹配网络自动整合装置报价、参数等信息 ，欢迎来电或留言咨询。
鲁公网安备37021402001368号