- 型号:
- Semyos
- 产地:
- 其他国家
PANalytical's Semyos energy-dispersive XRF wafer analyzer is the latest of our successful process control tools designed specifically for semiconductor and data storage metrology. This versatile instrument determines layer composition and thickness uniformity for a wide range of process films.
Moreover, with its<23um FWHM microspot, it is able to measure in the scribelines or in dedicated metrology areas on production wafers.
The Semos wafer analyzer is an advanced metrology tool that addresses the following industry demands:
* On-product thin film metrology
* In-line process control
* Simultaneous determination of film thinkness and composition
* Ability to characterize single films and multi-layer stacks
* Excellent repeatability and reproducibility (Gauge R&R)
* Minimal COO through excellent uptime, high throughput and minimum consumption of utilities
主要特点:
Semyos: Addressing the needs of the semiconductor and data storage industry.
Microspot XRF analysis on production wafers
Versatile wafer handling
For in-line production XRF analysis
Designed for ease-of-use
注:该仪器未取得中华人民共和国医疗器械注册证,不可用于临床诊断或治疗等相关用途





















马尔文纳米颗粒跟踪分析仪NanoSight
帕纳科金属专业版射线荧光光谱仪Zet
帕纳科水泥专业版射线荧光光谱仪Zet
帕纳科台式射线荧光光谱仪 Epsilon
帕纳科聚合物专业版射线荧光光谱仪Z
马尔文毛细管流变仪Rosand RH2000
全自动电熔融制样机Claisse LeNeo
马尔文微量热等温滴定量热仪MicroCa
高分辩衍射仪

鲁公网安备37021402001368号